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| INVESTIGATION OF DEPOSITION OF DIAMOND THIN FILMS ON MOLYBDENUM SUBSTRATE BY HFACVD METHOD |
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| DOI： |
| KeyWord:Diamond thin film HFACVD Raman spectrum |
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| Department of Engineering Materials |
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| Abstract: |
| Diamond thin films were deposited on molybdenum substrate by Hot Filament Assisted Chemical Vapour Deposition(HFACVD) method in H2 plus CH4 mixture precursor. The obtained diamond thin films were then examined using SEM, XRD, Laser Raman Spectrum and PL spectrum. Experimental results showed that a layer of Mo2C was formed on molybdenum substrate at first and then diamond nucleated on that Mo2C layer. Nevertheless, Diamond thin films prepared by the authors contained some defects, such as sp2 carbon impurity and neutral vacancy etc. |
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