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| Preparation Technology of Invar Alloy with Near-zero Inclusion for Fine Metal Mask |
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Received:November 16, 2023
Revised:November 16, 2023
Accepted:November 28, 2023
Published Online:March 24, 2025
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| DOI： |
| KeyWord:fine;metal mask(FMM), Invar;alloy, electroforming, super-gravity, inclusion;removal |
| Author | Institution |
| REN Wei |
University of Science and Technology Beijing |
| YU Yu |
University of Science and Technology Beijing |
| ZHANG Shuai |
University of Science and Technology Beijing |
| GUO Zhancheng |
University of Science and Technology Beijing |
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| Abstract: |
| Invar alloy is an important substrate for the production of fine metal mask (FMM), and its purity directly impacts the quality of FMM and the development level of OLED technology. Therefore, this review first outlines the main preparation technologies of FMM, introduces the quality requirements of Invar alloy as the substrate of FMM, and characterizes and analyzes the inclusions in domestic Invar alloy foil and imported Invar alloy foil. The results indicate that there is still a certain gap between the purity of domestic Invar alloy foil and imported ones, which is mainly reflected in the size and quantity of inclusions. To achieve the full localization of the OLED supporting industry and overcome the problem of Invar alloy with near-zero inclusion, the development of new preparation technology is a key breakthrough point. Finally, the research achievements in using the super-gravity technology to remove of impurity in Invar alloy and the feasibility of the application of electroforming Invar alloy foil are discussed in detail, and it is pointed out that super-gravity technology and electroforming technology are expected to solve the preparation problem of metal materials with near-zero inclusion. |
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